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Moktadir, Z. and Bruijn, M.P. and Wiegerink, R.J. and Elwenspoek, M.C. and Ridder, M.L. and Mels, W.A. (2002) Limitations of Heat Conductivity in Cryogenic Sensors Due to Surface Roughness. In: Proceedings of IEEE Sensors, 12 - 14 June 2002, Orlando, Florida. pp. 1024-1027. IEEE Computer Society. ISBN 0-7803-7454-1


Jansen, H.V. and de Boer, M.J. and Burger, J.F. and Legtenberg, R. and Elwenspoek, M.C. (1995) Black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317 *** ISI Impact 1,277 ***
Jansen, H.V. and de Boer, M.J. and Otter, B. and Elwenspoek, M.C. (1995) The black silicon method IV: the fabrication of three-dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 88-93. IEEE Computer Society. ISBN 0-7803-2503-6