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Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic engineering, 67-68. pp. 422-429. ISSN 0167-9317 *** ISI Impact 1,277 ***
Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, Kechun and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1651-1654. IEEE Computer Society. ISBN 0-7803-7731-1